A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler

Koichi Maezawa, Umer Farooq, Masayuki Mori. A Novel Displacement Sensor Based on a Frequency Delta-Sigma Modulator and its Application to a Stylus Surface Profiler. IEICE Trans. Electron., 106(9):486-490, September 2023. [doi]

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