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Characterization and optimization to improve uneven surface on MEMS bridge fabrication

Yasser Mafinejad, Abbas Z. Kouzani, M. Nassabi, Y. Lim, Khalil Mafinezhad. Characterization and optimization to improve uneven surface on MEMS bridge fabrication. Displays, 37:54-61, 2015. [doi]

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Yasser Mafinejad

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Abbas Z. Kouzani

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M. Nassabi

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Y. Lim

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Khalil Mafinezhad

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