Characterization of piezoresistive and electrothermal sensors in MEMS devices

Mohammad Maroufi, S. O. Reza Moheimani. Characterization of piezoresistive and electrothermal sensors in MEMS devices. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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