Evaluation of the machine learning classifier in wafer defects classification

Jessnor Arif Mat-Jizat, Anwar P. P. Abdul Majeed, Ahmad Fakhri Ab. Nasir, Zahari Taha, Edmund Yuen. Evaluation of the machine learning classifier in wafer defects classification. ICT Express, 7(4):535-539, 2021. [doi]

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