Harutaka Mekaru. Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography. Micromachines, 6(2):252-265, 2015. [doi]
@article{Mekaru15,
title = {Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography},
author = {Harutaka Mekaru},
year = {2015},
doi = {10.3390/mi6020252},
url = {http://dx.doi.org/10.3390/mi6020252},
researchr = {https://researchr.org/publication/Mekaru15},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {6},
number = {2},
pages = {252-265},
}