Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering - researchr publication authors

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Anjie Ming, Weibing Liu, Lingling Li, Xilong Sun, Xuan Zheng, Weibing Wang, Qiulin Tan, Jijun Xiong, Dapeng Chen. Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 366-369, IEEE, 2016. [doi]

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