Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump

Takeshi Mizuno, Takahito Iida, Yuji Ishino, Masaya Takasaki, Daisuke Yamaguchi, Masayuki Hara. Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump. In 12th Asian Control Conference, ASCC 2019, Kitakyushu-shi, Japan, June 9-12, 2019. pages 699-703, IEEE, 2019. [doi]

Authors

Takeshi Mizuno

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Takahito Iida

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Yuji Ishino

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Masaya Takasaki

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Daisuke Yamaguchi

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Masayuki Hara

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