Simulation-based solution of load-balancing problems in the photolithography area of a semiconductor wafer fabrication facility

Lars Mönch, Matthias Prause, Volker Schmalfuss. Simulation-based solution of load-balancing problems in the photolithography area of a semiconductor wafer fabrication facility. In Winter Simulation Conference. pages 1170-1177, 2001. [doi]

Authors

Lars Mönch

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Matthias Prause

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Volker Schmalfuss

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