James R. Morrison. Regular flow line models for semiconductor cluster tools: A case of lot dependent process times. In IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011. pages 561-566, IEEE, 2009. [doi]
@inproceedings{Morrison09-0,
title = {Regular flow line models for semiconductor cluster tools: A case of lot dependent process times},
author = {James R. Morrison},
year = {2009},
doi = {10.1109/COASE.2009.5234135},
url = {http://dx.doi.org/10.1109/COASE.2009.5234135},
researchr = {https://researchr.org/publication/Morrison09-0},
cites = {0},
citedby = {0},
pages = {561-566},
booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2009, Bangalore, India, 22-25 August, 2011},
publisher = {IEEE},
isbn = {978-1-4244-4578-3},
}