Improving the pH sensitivity of ISFET arrays with reactive ion etching - researchr publication authors

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Nicolas Moser, Christoforos Panteli, Dora Ma, Chris Toumazou, Kristel Fobelets, Pantelis Georgiou. Improving the pH sensitivity of ISFET arrays with reactive ion etching. In IEEE Biomedical Circuits and Systems Conference, BioCAS 2017, Torino, Italy, October 19-21, 2017. pages 1-4, IEEE, 2017. [doi]

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