Enhancing open-loop control of MEMS using linear electrostatic levitation actuators

Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian. Enhancing open-loop control of MEMS using linear electrostatic levitation actuators. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]

Authors

Mohammad Mousavi

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Mohammad Alzgool

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Shahrzad Towfighian

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