Imaging of an Electret Film Fabricated on a Micro-Machined Energy Harvester by a Kelvin Probe Force Microscope - researchr publication authors

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Kenta Nakazawa, Kengo Fukazawa, Takeshi Uruma, Gen Hashiguchi, Futoshi Iwata. Imaging of an Electret Film Fabricated on a Micro-Machined Energy Harvester by a Kelvin Probe Force Microscope. IEEE T. Instrumentation and Measurement, 71:1-7, 2022. [doi]

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