Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever

Hazhir Mahmoodi Nasrabadi, Nastaran Nikooienejad, M. Bulut Coskun, S. O. Reza Moheimani. Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Authors

Hazhir Mahmoodi Nasrabadi

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Nastaran Nikooienejad

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M. Bulut Coskun

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S. O. Reza Moheimani

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