Position feedback control of electrostatically controlled linear actuator system

Tuan-Anh Nguyen, Satoshi Konishi. Position feedback control of electrostatically controlled linear actuator system. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, Nagoya, Japan, November 10-13, 2013. pages 1-5, IEEE, 2013. [doi]

@inproceedings{NguyenK13-8,
  title = {Position feedback control of electrostatically controlled linear actuator system},
  author = {Tuan-Anh Nguyen and Satoshi Konishi},
  year = {2013},
  doi = {10.1109/MHS.2013.6710459},
  url = {http://dx.doi.org/10.1109/MHS.2013.6710459},
  researchr = {https://researchr.org/publication/NguyenK13-8},
  cites = {0},
  citedby = {0},
  pages = {1-5},
  booktitle = {International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, Nagoya, Japan, November 10-13, 2013},
  publisher = {IEEE},
  isbn = {978-1-4799-1527-9},
}