A planar PDMS micropump based on in-contact low-leakage check valves

Junhui Ni, Bin Wang, Beizhi Li, Qiao Lin. A planar PDMS micropump based on in-contact low-leakage check valves. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 608-611, IEEE, 2010. [doi]

Authors

Junhui Ni

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Bin Wang

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Beizhi Li

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Qiao Lin

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