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Analysis and compensation in specific frequency based on composite filter for nanoscale motion control

Fumito Nishi, Seiichiro Katsura. Analysis and compensation in specific frequency based on composite filter for nanoscale motion control. In IECON 2014 - 40th Annual Conference of the IEEE Industrial Electronics Society, Dallas, TX, USA, October 29 - Nov. 1, 2014. pages 2695-2700, IEEE, 2014. [doi]

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Fumito Nishi

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Seiichiro Katsura

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