Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process

Jaesub Oh, Hyeong-Sub Song, Jongcheol Park, Jong-Kwon Lee. Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process. Sensors, 21(20):6722, 2021. [doi]

@article{OhSPL21,
  title = {Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process},
  author = {Jaesub Oh and Hyeong-Sub Song and Jongcheol Park and Jong-Kwon Lee},
  year = {2021},
  doi = {10.3390/s21206722},
  url = {https://doi.org/10.3390/s21206722},
  researchr = {https://researchr.org/publication/OhSPL21},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {21},
  number = {20},
  pages = {6722},
}