Film Bulk Acoustic-Wave Resonator based radiation sensor

J. Oiler, Xiaotun Qiu, Jie Zhu, Ziyu Wang, Cunjiang Yu, H. Barnaby, K. Holbert, Hongyu Yu. Film Bulk Acoustic-Wave Resonator based radiation sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 967-970, IEEE, 2010. [doi]

Authors

J. Oiler

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Xiaotun Qiu

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Jie Zhu

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Ziyu Wang

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Cunjiang Yu

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H. Barnaby

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K. Holbert

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Hongyu Yu

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