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Optimized Design of the MEMS-Based Three-Axis Thermal Accelerometer for Its Better Performance in a Wide Measurement Range

A. I. Ovodov, G. D. Demin, N. A. Djuzhev, M. A. Makhiboroda. Optimized Design of the MEMS-Based Three-Axis Thermal Accelerometer for Its Better Performance in a Wide Measurement Range. In IEEE Sensors Applications Symposium, SAS 2019, Sophia Antipolis, France, March 11-13, 2019. pages 1-5, IEEE, 2019. [doi]

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A. I. Ovodov

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G. D. Demin

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N. A. Djuzhev

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M. A. Makhiboroda

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