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Savas Ozdemir, Sohail Akhtar, Ozgur E. Gunal, Mahmoud E. Khater, Resul Saritas, M. Eihab Abdel-Rahman, Mustafa Yavuz. Measuring the Quality Factor in MEMS Devices. Micromachines, 6(12):1935-1945, 2015. [doi]