Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting - researchr publication authors

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Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu. Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting. In 2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014, San Diego, CA, USA, October 5-8, 2014. pages 133-138, IEEE, 2014. [doi]

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