Cluster tool design comparisons via simulation

Kyungsu Park, James R. Morrison. Cluster tool design comparisons via simulation. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1877-1887, WSC, 2011. [doi]

@inproceedings{ParkM11-1,
  title = {Cluster tool design comparisons via simulation},
  author = {Kyungsu Park and James R. Morrison},
  year = {2011},
  url = {http://dl.acm.org/citation.cfm?id=2431739},
  researchr = {https://researchr.org/publication/ParkM11-1},
  cites = {0},
  citedby = {0},
  pages = {1877-1887},
  booktitle = {Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011},
  editor = {S. Jain and Roy R. Creasey Jr. and Jan Himmelspach and K. Preston White and Michael C. Fu},
  publisher = {WSC},
}