Design Considerations for BEOL MIM Capacitor Modeling in RF CMOS Processes

Shyam Parthasarathy, Balaji Swaminathan, Ananth Sundaram, Robert A. Groves. Design Considerations for BEOL MIM Capacitor Modeling in RF CMOS Processes. In VLSI Design 2010: 23rd International Conference on VLSI Design, 9th International Conference on Embedded Systems, Bangalore, India, 3-7 January 2010. pages 188-193, IEEE, 2010. [doi]

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