A Methodology for Process Design Simulators of MEMS Based on VRML and JAVA

François Pêcheux. A Methodology for Process Design Simulators of MEMS Based on VRML and JAVA. In 2001 International Conference on Microelectronics Systems Education (MSE 2001), 17-18 July 2001, Las Vegas, NV, USA. pages 24-25, IEEE Computer Society, 2001. [doi]

@inproceedings{Pecheux01,
  title = {A Methodology for Process Design Simulators of MEMS Based on VRML and JAVA},
  author = {François Pêcheux},
  year = {2001},
  url = {http://computer.org/proceedings/mse/1156/11560024abs.htm},
  tags = {rule-based, Java, design},
  researchr = {https://researchr.org/publication/Pecheux01},
  cites = {0},
  citedby = {0},
  pages = {24-25},
  booktitle = {2001 International Conference on Microelectronics Systems Education (MSE 2001), 17-18 July 2001, Las Vegas, NV, USA},
  publisher = {IEEE Computer Society},
  isbn = {0-7695-1156-2},
}