Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Rafel Perelló-Roig, Jaume Verd, Sebastià A. Bota, Jaume Segura 0001. Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing. Sensors, 20(17):4663, 2020. [doi]

Authors

Rafel Perelló-Roig

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Jaume Verd

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Sebastià A. Bota

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Jaume Segura 0001

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