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Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems

Anna Persano, Fabio Quaranta, Antonietta M. Taurino, Pietro Siciliano, Jacopo Iannacci. Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems. Sensors, 20(7):2133, 2020. [doi]

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