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Design and fabrication of thin-film aluminum microheater and nickel temperature sensor

R. Phatthanakun, P. Deekla, W. Pummara, C. Sriphung, C. Pantong, N. Chomnawang. Design and fabrication of thin-film aluminum microheater and nickel temperature sensor. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 112-115, IEEE, 2012. [doi]

Authors

R. Phatthanakun

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P. Deekla

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W. Pummara

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C. Sriphung

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C. Pantong

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N. Chomnawang

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