Dynamic modeling and input shaping of thermal bimorph MEMS actuators - researchr publication authors

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Dan O. Popa, Byoung Hun Kang, John T. Wen, Harry E. Stephanou, George Skidmore, Aaron Geisberger. Dynamic modeling and input shaping of thermal bimorph MEMS actuators. In Proceedings of the 2003 IEEE International Conference on Robotics and Automation, ICRA 2003, September 14-19, 2003, Taipei, Taiwan. pages 1470-1475, IEEE, 2003.

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