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Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing

Lionel Presmanes, Yohann Thimont, Imane el Younsi, Audrey Chapelle, Frédéric Blanc, Chabane Talhi, Corine Bonningue, Antoine Barnabé, Philippe Ménini, Philippe Tailhades. Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing. Sensors, 17(6):1409, 2017. [doi]

Authors

Lionel Presmanes

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Yohann Thimont

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Imane el Younsi

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Audrey Chapelle

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Frédéric Blanc

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Chabane Talhi

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Corine Bonningue

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Antoine Barnabé

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Philippe Ménini

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Philippe Tailhades

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