Ivan Puchades, Mustafa Koz, Lynn Fuller. Mechanical Vibrations of Thermally Actuated Silicon Membranes. Micromachines, 3(2):255-269, 2012. [doi]
@article{PuchadesKF12,
title = {Mechanical Vibrations of Thermally Actuated Silicon Membranes},
author = {Ivan Puchades and Mustafa Koz and Lynn Fuller},
year = {2012},
doi = {10.3390/mi3020255},
url = {http://dx.doi.org/10.3390/mi3020255},
researchr = {https://researchr.org/publication/PuchadesKF12},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {3},
number = {2},
pages = {255-269},
}