Design and optimization of a CMOS-MEMS integrated current mirror sensing based MOSFET embedded pressure sensor

Pradeep Kumar Rathore, Brishbhan Singh Panwar. Design and optimization of a CMOS-MEMS integrated current mirror sensing based MOSFET embedded pressure sensor. In Proceedings of the IEEE International Conference on Control Applications, CCA 2013, Hyderabad, India, August 28-30, 2013. pages 443-448, IEEE, 2013. [doi]