3D-measurement using a scanning electron microscope

Eduard Reithmeier, Taras Vynnyk, Thanin Schultheis. 3D-measurement using a scanning electron microscope. Applied Mathematics and Computation, 217(3):1193-1201, 2010. [doi]

@article{ReithmeierVS10,
  title = {3D-measurement using a scanning electron microscope},
  author = {Eduard Reithmeier and Taras Vynnyk and Thanin Schultheis},
  year = {2010},
  doi = {10.1016/j.amc.2010.01.107},
  url = {http://dx.doi.org/10.1016/j.amc.2010.01.107},
  researchr = {https://researchr.org/publication/ReithmeierVS10},
  cites = {0},
  citedby = {0},
  journal = {Applied Mathematics and Computation},
  volume = {217},
  number = {3},
  pages = {1193-1201},
}