Ombeline de La Rochefoucauld, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang 0003, Xavier Levecq, Martin Piponnier, Philippe Zeitoun. EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors, 21(3):874, 2021. [doi]
@article{RochefoucauldDH21,
title = {EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging},
author = {Ombeline de La Rochefoucauld and Guillaume Dovillaire and Fabrice Harms and Mourad Idir and Lei Huang 0003 and Xavier Levecq and Martin Piponnier and Philippe Zeitoun},
year = {2021},
doi = {10.3390/s21030874},
url = {https://doi.org/10.3390/s21030874},
researchr = {https://researchr.org/publication/RochefoucauldDH21},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {21},
number = {3},
pages = {874},
}