Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing

Avisek Roy, Mehdi Azadmehr, Bao Q. Ta, Philipp Häfliger, Knut E. Aasmundtveit. Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing. Sensors, 19(19):4340, 2019. [doi]

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