Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy

Mabel Ruiz-Lopez, Masoud Mehrjoo, Barbara Keitel, Elke Plönjes, Domenico Alj, Guillaume Dovillaire, Lu Li, Philippe Zeitoun. Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy. Sensors, 20(22):6426, 2020. [doi]

Authors

Mabel Ruiz-Lopez

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Masoud Mehrjoo

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Barbara Keitel

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Elke Plönjes

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Domenico Alj

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Guillaume Dovillaire

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Lu Li

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Philippe Zeitoun

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