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Employing Air Holes In An Electrostatic Force Driven MEMS DC Electric Field Sensor

Daniel Ryckman, Tao Chen, Cyrus Shafai. Employing Air Holes In An Electrostatic Force Driven MEMS DC Electric Field Sensor. In IEEE Canadian Conference on Electrical and Computer Engineering, CCECE 2025, Vancouver, BC, Canada, May 26-29, 2025. pages 401-405, IEEE, 2025. [doi]

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Daniel Ryckman

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Tao Chen

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Cyrus Shafai

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