Frequency separation self resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors - researchr publication authors

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Koichi Sakata, Hiroyoshi Asaumi, Kazuyuki Hirachi, Kazuaki Saiki, Hiroshi Fujimoto. Frequency separation self resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors. In IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society, Vienna, Austria, November 10-13, 2013. pages 6478-6483, IEEE, 2013. [doi]

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