A real-time image processing algorithm for visual inspection of semiconductor wafer patterns

Hiroshi Sakou, Haruo Yoda, Masakazu Ejiri. A real-time image processing algorithm for visual inspection of semiconductor wafer patterns. Systems and Computers in Japan, 18(10):79-89, 1987. [doi]

Authors

Hiroshi Sakou

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Haruo Yoda

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Masakazu Ejiri

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