Analysis and Modeling of RF-MEMS Disk Resonator

Mostafa M. Sakr, Mousa Khalid El-Shafie, Hany Fikry Ragai. Analysis and Modeling of RF-MEMS Disk Resonator. In 2006 International Conference on MEMS, NANO and Smart Systems, ICMENS 2006, Cairo, Egypt, December 27-29, 2006. pages 19-22, IEEE, 2006. [doi]

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