Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow

Shinya Sakuma, Masakuni Sugita, Fumihito Arai. Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow. Micromachines, 4(2):232-242, 2013. [doi]

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