V. Sánchez, J. Munguía, M. Estrada. Photo-CVD process for ultra thin SiO::2:: films. Microelectronics Reliability, 44(5):885-888, 2004. [doi]
@article{SanchezME04,
title = {Photo-CVD process for ultra thin SiO::2:: films},
author = {V. Sánchez and J. Munguía and M. Estrada},
year = {2004},
doi = {10.1016/j.microrel.2004.02.003},
url = {http://dx.doi.org/10.1016/j.microrel.2004.02.003},
researchr = {https://researchr.org/publication/SanchezME04},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {44},
number = {5},
pages = {885-888},
}