Optical metrology aimed for process quality-control-loops (QCL) in production-modules for micro-technology - researchr publication authors

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Ubaldo Aleriano Sanchez, Tilo Pfeifer. Optical metrology aimed for process quality-control-loops (QCL) in production-modules for micro-technology. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: The Hague, Netherlands, 10-13 October 2004. pages 5417-5422, IEEE, 2004. [doi]

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