Impact of halo implantation on short channel effect in MOSFETs

Abhineet Sarkar, Rahul Patil, Pramod Mishra. Impact of halo implantation on short channel effect in MOSFETs. In B. K. Mishra, editor, Proceedings of the ICWET 11 International Conference & Workshop on Emerging Trends in Technology, Mumbai, Maharashtra, India, February 25 - 26, 2011. pages 1374, ACM, 2011. [doi]

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