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Nonparametric Virtual Sensors for Semiconductor Manufacturing - Using Information Theoretic Learning and Kernel Machines

Andrea Schirru, Simone Pampuri, Cristina De Luca, Giuseppe De Nicolao. Nonparametric Virtual Sensors for Semiconductor Manufacturing - Using Information Theoretic Learning and Kernel Machines. In Jean-Louis Ferrier, Alain Bernard, Oleg Yu. Gusikhin, Kurosh Madani, editors, ICINCO 2011 - Proceedings of the 8th International Conference on Informatics in Control, Automation and Robotics, Volume 2, Noordwijkerhout, The Netherlands, 28 - 31 July, 2011. pages 349-358, SciTePress, 2011.

Authors

Andrea Schirru

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Simone Pampuri

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Cristina De Luca

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Giuseppe De Nicolao

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