Improved metrology of implant lines on static images of textured silicon wafers using line integral method - researchr publication authors

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Kuldeep Shah, Eli Saber, Kevin Verrier. Improved metrology of implant lines on static images of textured silicon wafers using line integral method. In Edmund Y. Lam, Kurt S. Niel, editors, Image Processing: Machine Vision Applications VIII, San Francisco, California, United States, February 8-12, 2015. Volume 9405 of SPIE Proceedings, SPIE, 2015. [doi]

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