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Single band electronic conduction in hafnium oxide prepared by atomic layer deposition

Sergey Shaimeev, Vladimir Gritsenko, Kaupo Kukli, Hei Wong, Eun-Hong Lee, Chungwoo Kim. Single band electronic conduction in hafnium oxide prepared by atomic layer deposition. Microelectronics Reliability, 47(1):36-40, 2007. [doi]

Authors

Sergey Shaimeev

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Vladimir Gritsenko

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Kaupo Kukli

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Hei Wong

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Eun-Hong Lee

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Chungwoo Kim

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