Robust multi-parameter sensing probe for water monitoring based on ALD-coated metallic micro-patterns - researchr publication authors

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Ferdous Shaun, Massimo Pellegrino, William Cesar, Frédéric Marty, Zhifei Xu, Martine Capo-Chichi, Philippe Basset, Bérengère Lebental, Tarik Bourouina. Robust multi-parameter sensing probe for water monitoring based on ALD-coated metallic micro-patterns. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 342-345, IEEE, 2016. [doi]

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