Thin Film Magnetic Head Wafer Inspection Technique Using Geometrical Feature Based Image Comparison

Atsushi Shimoda, Hisafumi Iwata, Yukihiro Shibata, Hidehiro Ikeda. Thin Film Magnetic Head Wafer Inspection Technique Using Geometrical Feature Based Image Comparison. In Proceedings of IAPR Workshop on Machine Vision Applications, MVA 1998, November 17-19, 1998, Chiba, Japan. pages 531-534, 1998. [doi]

Authors

Atsushi Shimoda

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Hisafumi Iwata

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Yukihiro Shibata

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Hidehiro Ikeda

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