Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors

Lin Shu, Bin Peng, Yilin Cui, Dongdong Gong, Zhengbing Yang, Xingzhao Liu, Wanli Zhang. Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors. Sensors, 16(9):1436, 2016. [doi]

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