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Long-term stresses on linear micromirrors for pico projector application

M. Silvestrini, Marco Barbato, S. Costantini, L. Castoldi, F. Vercesi, L. Zanotti, Gaudenzio Meneghesso. Long-term stresses on linear micromirrors for pico projector application. Microelectronics Reliability, 76:626-630, 2017. [doi]

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